Proj
J-GLOBAL ID：202104009934024445  Research Project code：7700115371

パターン化弾道面放出近接露光装置の研究

パターン化弾道面放出近接露光装置の研究
Study period：2001 -
Organization (1)：
株式会社クレステック

About 株式会社クレステック


Corporate responsibility：
株式会社クレステック

About 株式会社クレステック


Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
パターン化

About パターン化

, 
弾道

About 弾道

, 
放出

About 放出

, 
露光装置

About 露光装置

, 
研究

About 研究

Research program：
Industry-Academia Collaborative R&D

About Industry-Academia Collaborative R&D

＞
R&D Programs Focused on Technology Transfer

About R&D Programs Focused on Technology Transfer

＞
Programs dosed application by FY2008

About Programs dosed application by FY2008

＞
Promoting business using advanced technology Development of Creative Technology Seeds

About Promoting business using advanced technology Development of Creative Technology Seeds

＞
Modeling of Innovative Research results

About Modeling of Innovative Research results


Organization with control over the research：
Japan Science and Technology Agency

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