Proj
J-GLOBAL ID：202104010441612630  Research Project code：7700400422

プラズマイオンを用いた大型基材への窒化ホウ素(BN)薄膜の形成法

プラズマイオンを用いた大型基材への窒化ホウ素(BN)薄膜の形成法
Study period：1999 -
Organization (1)：
東邦化研株式会社

About 東邦化研株式会社


Corporate responsibility：
東邦化研株式会社

About 東邦化研株式会社


Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
プラズマ

About プラズマ

, 
イオン

About イオン

, 
大型

About 大型

, 
窒化ホウ素

About 窒化ホウ素

, 
BN

About BN

, 
薄膜

About 薄膜

Research program：
Industry-Academia Collaborative R&D

About Industry-Academia Collaborative R&D

＞
R&D Programs Focused on Technology Transfer

About R&D Programs Focused on Technology Transfer

＞
Programs dosed application by FY2008

About Programs dosed application by FY2008

＞
Promoting business using advanced technology Development of Creative Technology Seeds

About Promoting business using advanced technology Development of Creative Technology Seeds

＞
Modeling of Innovative Research results

About Modeling of Innovative Research results


Organization with control over the research：
Japan Science and Technology Agency

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