Proj
J-GLOBAL ID：202104011293295154  Research Project code：7700400188

超微細加工用イオン源

超微細加工用イオン源
Study period：1998 -
Organization (1)：
株式会社日立ハイテクサイエンスシステムズ

About 株式会社日立ハイテクサイエンスシステムズ


Corporate responsibility：
株式会社日立ハイテクサイエンスシステムズ

About 株式会社日立ハイテクサイエンスシステムズ


Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
微細加工

About 微細加工

, 
イオン源

About イオン源

Research program：
Industry-Academia Collaborative R&D

About Industry-Academia Collaborative R&D

＞
R&D Programs Focused on Technology Transfer

About R&D Programs Focused on Technology Transfer

＞
Programs dosed application by FY2008

About Programs dosed application by FY2008

＞
Promoting business using advanced technology Development of Creative Technology Seeds

About Promoting business using advanced technology Development of Creative Technology Seeds

＞
Modeling of Innovative Research results

About Modeling of Innovative Research results


Organization with control over the research：
Japan Science and Technology Agency

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