Proj
J-GLOBAL ID:202104013386975042  Research Project code:17941282

次世代パワーデバイス用窒化ガリウム基板の超精密研磨技術の開発

次世代パワーデバイス用窒化ガリウム基板の超精密研磨技術の開発
National award number:JPMJTM17E8
Study period:2017 -
Organization (1):
Principal investigator: ( , 大学院先端科学研究部(工), 准教授 )
DOI: https://doi.org/10.52926/JPMJTM17E8
Terms in the title (5):
Terms in the title
Keywords automatically extracted from the title.
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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