Proj
J-GLOBAL ID:202104013962797309  Research Project code:7700400389

新波長変換結晶CLBOを用いた微細加工用全固体短紫外線レーザー光源の開発

新波長変換結晶CLBOを用いた微細加工用全固体短紫外線レーザー光源の開発
Study period:1999 -
Organization (1):
Corporate responsibility:
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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