Proj
J-GLOBAL ID:202104015654925676  Research Project code:15668154

高速回転式ミストCVD装置の実用化に向けた最適化研究

高速回転式ミストCVD装置の実用化に向けた最適化研究
National award number:JPMJTM15K1
Study period:2015 - 2016
Organization (1):
Research responsibility: ( , 大学院自然科学研究科(工), 教授 )
DOI: https://doi.org/10.52926/JPMJTM15K1
Terms in the title (5):
Terms in the title
Keywords automatically extracted from the title.
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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