Proj
J-GLOBAL ID：202104015666344245  Research Project code：09151559

レジスト除去用大気圧誘導結合プラズマ装置開発

レジスト除去用大気圧誘導結合プラズマ装置開発
Study period：2009 - 2010
Organization (1)：
リバーベル株式会社

About リバーベル株式会社


Corporate responsibility：
リバーベル株式会社

About リバーベル株式会社


Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
レジスト

About レジスト

, 
大気圧

About 大気圧

, 
誘導結合プラズマ

About 誘導結合プラズマ

, 
開発

About 開発

Research program：
Industry-Academia Collaborative R&D

About Industry-Academia Collaborative R&D

＞
R&D Programs Focused on Technology Transfer

About R&D Programs Focused on Technology Transfer

＞
Promotion for Regional Innovation

About Promotion for Regional Innovation

＞
Comprehensive Support Programs for Creation of Regional Innovation

About Comprehensive Support Programs for Creation of Regional Innovation

＞
Local Needs Rapid Response Type

About Local Needs Rapid Response Type


Organization with control over the research：
Japan Science and Technology Agency

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