Proj
J-GLOBAL ID:202104017221852243  Research Project code:13423553

超高速・超低消費電力LSI向けナノ界面制御超低抵抗率Cu配線技術の確立

超高速・超低消費電力LSI向けナノ界面制御超低抵抗率Cu配線技術の確立
Study period:2014 -
Organization (2):
Corporate responsibility:
Research responsibility: ( , 工学部, 教授 )
Terms in the title (5):
Terms in the title
Keywords automatically extracted from the title.
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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