Proj
J-GLOBAL ID:202104018137181712  Research Project code:7700400306

常圧CVD法によるSiCの単結晶成長装置の開発

常圧CVD法によるSiCの単結晶成長装置の開発
Study period:1999 -
Organization (1):
Corporate responsibility:
Research program:
Organization with control over the research:
Japan Science and Technology Agency

Return to Previous Page