Proj
J-GLOBAL ID：202104019063226529  Research Project code：7700400626

VUV微細加工装置

VUV微細加工装置
Study period：2000 -
Organization (1)：
株式会社ニコン技術工房

About 株式会社ニコン技術工房


Corporate responsibility：
株式会社ニコン技術工房

About 株式会社ニコン技術工房


Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
VUV

About VUV

, 
微細加工装置

About 微細加工装置

Research program：
Industry-Academia Collaborative R&D

About Industry-Academia Collaborative R&D

＞
R&D Programs Focused on Technology Transfer

About R&D Programs Focused on Technology Transfer

＞
Programs dosed application by FY2008

About Programs dosed application by FY2008

＞
Promoting business using advanced technology Development of Creative Technology Seeds

About Promoting business using advanced technology Development of Creative Technology Seeds

＞
Modeling of Innovative Research results

About Modeling of Innovative Research results


Organization with control over the research：
Japan Science and Technology Agency

Return to Previous Page

TOP

BOTTOM