Proj
J-GLOBAL ID：202104019110469079  Research Project code：7700400097

プラズマを用いた超精密加工装置における高周波電力供給システム

プラズマを用いた超精密加工装置における高周波電力供給システム
Study period：1997 -
Organization (1)：
明昌機工株式会社

About 明昌機工株式会社


Corporate responsibility：
明昌機工株式会社

About 明昌機工株式会社


Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
プラズマ

About プラズマ

, 
精密加工

About 精密加工

, 
高周波

About 高周波

, 
電力供給システム

About 電力供給システム

Research program：
Industry-Academia Collaborative R&D

About Industry-Academia Collaborative R&D

＞
R&D Programs Focused on Technology Transfer

About R&D Programs Focused on Technology Transfer

＞
Programs dosed application by FY2008

About Programs dosed application by FY2008

＞
Promoting business using advanced technology Development of Creative Technology Seeds

About Promoting business using advanced technology Development of Creative Technology Seeds

＞
Modeling of Innovative Research results

About Modeling of Innovative Research results


Organization with control over the research：
Japan Science and Technology Agency

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