Proj
J-GLOBAL ID：202104021184619093  Research Project code：15809184

Si 貫通電極ウエーハの全自動薄化加工装置

Si 貫通電極ウエーハの全自動薄化加工装置
National award number：JPMJTT15A4
Study period：2016 -
Organization (1)：
株式会社岡本工作機械製作所

About 株式会社岡本工作機械製作所


Corporate responsibility：
株式会社岡本工作機械製作所

About 株式会社岡本工作機械製作所


DOI： https://doi.org/10.52926/JPMJTT15A4
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
Si

About Si

, 
貫通電極

About 貫通電極

, 
ウエーハ

About ウエーハ

, 
加工装置

About 加工装置

Research program：
Industry-Academia Collaborative R&D

About Industry-Academia Collaborative R&D

＞
R&D Programs Focused on Technology Transfer

About R&D Programs Focused on Technology Transfer

＞
Adaptable & Seamless Technology Transfer Program through Target-driven R&D

About Adaptable & Seamless Technology Transfer Program through Target-driven R&D

＞
Company-led phase

About Company-led phase

＞
NexTEP-A

About NexTEP-A


Organization with control over the research：
Japan Science and Technology Agency

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