Proj
J-GLOBAL ID:202104021324220943  Research Project code:17938885

高空間分解能SiC・GaNウェハ結晶品質評価装置の開発

高空間分解能SiC・GaNウェハ結晶品質評価装置の開発
National award number:JPMJTM17B7
Study period:2017 -
Organization (1):
Principal investigator: ( , 工学(系)研究科(研究院), 准教授 )
DOI: https://doi.org/10.52926/JPMJTM17B7
Research program:
Organization with control over the research:
Japan Science and Technology Agency

Return to Previous Page