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J-GLOBAL ID：201602235253412667   整理番号：16A1315750

Flexible hard Al-Si-N films for high temperature operation

著者 (11件)： Musil J. (National Research Tomsk Polytechnic University, 30 Lenin Avenue, 634050 Tomsk, Russia) ,  Musil J. (Department of Physics and NTIS-European Centre of Excellence, Faculty of Applied Sciences, University of West Bohemia, Univerzitni 22, CZ-306 14 Plzen, Czech Republic) ,  Remnev G. (National Research Tomsk Polytechnic University, 30 Lenin Avenue, 634050 Tomsk, Russia) ,  Legostaev V. (National Research Tomsk Polytechnic University, 30 Lenin Avenue, 634050 Tomsk, Russia) ,  Uglov V. (National Research Tomsk Polytechnic University, 30 Lenin Avenue, 634050 Tomsk, Russia) ,  Uglov V. (Belarusian State University, 4 Nezavisimosti avenue, 220030 Minsk, Republic of Belarus) ,  Lebedynskiy A. (National Research Tomsk Polytechnic University, 30 Lenin Avenue, 634050 Tomsk, Russia) ,  Lauk A. (National Research Tomsk Polytechnic University, 30 Lenin Avenue, 634050 Tomsk, Russia) ,  Prochazka J. (Department of Physics and NTIS-European Centre of Excellence, Faculty of Applied Sciences, University of West Bohemia, Univerzitni 22, CZ-306 14 Plzen, Czech Republic) ,  Haviar S. (Department of Physics and NTIS-European Centre of Excellence, Faculty of Applied Sciences, University of West Bohemia, Univerzitni 22, CZ-306 14 Plzen, Czech Republic) ,  Smolyanskiy E. (National Research Tomsk Polytechnic University, 30 Lenin Avenue, 634050 Tomsk, Russia)
資料名： Surface & Coatings Technology  (Surface & Coatings Technology)
巻： 307  号： PB  ページ： 1112-1118  発行年： 2016年 
JST資料番号： D0205C  ISSN： 0257-8972  資料種別： 逐次刊行物 (A)
発行国： オランダ (NLD)  言語： 英語 (EN)

著者キーワード (6件)： Al-Si-N film ,  Mechanical properties ,  Structure ,  Thermal stability ,  High-temperature operation ,  Magnetron sputtering