The concept of local work cells as the key element for computer automated process data logging and data management in the micro-electronic production industry.

MESSER K H

Art

J-GLOBAL ID：200902000079347894 Reference number：93A0774146

The concept of local work cells as the key element for computer automated process data logging and data management in the micro-electronic production industry.

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Material：
Volume： 12th Page： 26-33 Publication year： 1992
JST Material Number： T0858A Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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