Art
J-GLOBAL ID:200902000141388276
Reference number:89A0247084
Particulate contamination in atomic and molecular-beam deposition systems.
原子ビーム,分子ビーム堆積系における微粒子汚染
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Author (2):
,
Material:
Volume:
6
Issue:
4
Page:
2504-2507
Publication year:
Jul. 1988
JST Material Number:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
Document type:
Article
Article type:
原著論文
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
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JST classification (1):
JST classification
Category name(code) classified by JST.
Techniques and equipment of thin film deposition
Terms in the title (4):
Terms in the title
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,
,
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