About J-GLOBAL

日本語

Font size
  • A
  • A

Articleの詳細情報

ArticleJ-GLOBAL ID:200902001879175702整理番号:90A0833100

同心円パターン作製用精密スピンドル搭載電子ビーム描画装置の開発 1 描画方式と装置構成

The development of the precise-spindle installed electron beam drawing equipment for the concentric circle pattern manufacture.1.The drawing system and the equipment composition.

著者:笹岡俊雄(立石電機 生産技研)、三井正敏(立石電機 生産技研)、後藤博史(立石電機 中研)・・・
資料名:精密工学会大会学術講演会講演論文集 巻:1989 号:Autumn 1 ページ:173-174
発行年:1989年10月
  • J-GLOBAL home
  • Bookmark J-GLOBAL

J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.