The development of the precise-spindle installed electron beam drawing equipment for the concentric circle pattern manufacture.1.The drawing system and the equipment composition.

SASAOKA TOSHIO; MITSUI MASATOSHI; GOTO HIROFUMI; OGATA SHIRO; YAMASHITA MAKI

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J-GLOBAL ID：200902001879175702 Reference number：90A0833100

The development of the precise-spindle installed electron beam drawing equipment for the concentric circle pattern manufacture.1.The drawing system and the equipment composition.

同心円パターン作製用精密スピンドル搭載電子ビーム描画装置の開発 1 描画方式と装置構成

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Material：
Volume： 1989 Issue： Autumn 1 Page： 173-174 Publication year： Oct. 1989
JST Material Number： Y0914A Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Manufacturing technology of solid-state devices

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