electron beam lithography

電子素子
Synonyms (7)：

electron beam lithography (電子線リソグラフィー)
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electron beam lithography (電子ビーム露光)
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electron beam lithography (電子ビーム描画)
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electron beam lithography (電子線露光)
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electron beam lithography (電子線描画)
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Related terms (1)：

electron beam lithography system (電子ビーム露光装置)
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Broader terms (1)：

lithography (リソグラフィー)
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Narrower terms (2)：

direct drawing (直接描画)
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LEEPL
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