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ArticleJ-GLOBAL ID:200902001890642754整理番号:87A0022144

Negative ion kinetics in radio-frequency glow discharges.

高周波グロー放電中の負イオンの運動

著者:GOTTSCHO R A(AT&T Bell Lab., NJ, USA)、GAEBE C E(AT&T Bell Lab., NJ, USA)
資料名:J Vac Sci Technol A 巻:4 号:3 Pt 2 ページ:1795-1796
発行年:1986年05月
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About J-GLOBAL

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