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ArticleJ-GLOBAL ID:200902001917197049整理番号:91A0324321

Friction and damage of coatings formed by sputtering polytetrafluoroethylene and polyimide.

ポリテトラフルオロエチレン並びにポリイミドのスパッタリングによって形成した皮膜の摩擦と損傷

著者:YAMADA Y(Kanazawa Univ., Ishikawa, JPN)、TANAKA K(Kanazawa Univ., Ishikawa, JPN)、SAITO K(Kanazawa Univ., Ishikawa, JPN)
資料名:Surf Coat Technol 巻:43/44 号:1/3 Pt 2 ページ:618-628
発行年:1990年12月10日
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