Term
J-GLOBAL ID:200906040944195589 

sputtering

Subject category:
Subject category
Subject category of the technical term.
設計および工業的操作・装置・部品
Sciterm (1):
Sciterm
Terms compiled by the various academic associations and the Ministry of Education, Culture, Sports, Science and Technology.
  • 化学編(増訂2版) / スパッタリング / sputtering
Related terms  (7):
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Narrower terms (9):
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Thsaurus map:
Thesaurus Map (Notice) Synonyms included only in Sciterm are not displayed

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