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ArticleJ-GLOBAL ID:200902001935003090整理番号:87A0377340

CZシリコン中の酸素析出物の核成形過程

Nucleation process of oxygen precipitate in silicon crystal by CZ method.

著者:島貫康(三菱金属 中研)、降矢久(三菱金属 中研)、鈴木勇(三菱金属 中研)
資料名:電気学会電子材料研究会資料 巻:EFM-87 号:9-15 ページ:19-29
発行年:1987年06月23日
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About J-GLOBAL

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