Semiconductor device development with homoepitaxial diamond films.

GROT S A; GILDENBLAT G SH; HATFIELD C W; BADZIAN A R; BADZIAN T

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J-GLOBAL ID：200902002006350555 Reference number：92A0231049

Semiconductor device development with homoepitaxial diamond films.

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Author (5)： , , , ,
Material：
Volume： 266 Page： 767-772 Publication year： 1991
JST Material Number： C0189B Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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