Art
J-GLOBAL ID:200902015498909441
Reference number:86A0489948
Thin film growth rate effects for primary ion beam deposited diamondlike carbon films.
一次のイオンビームを使って蒸着するダイアモンド様炭素膜の成長速度
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Author (2):
,
Material:
Volume:
4
Issue:
3 Pt 1
Page:
560-563
Publication year:
May. 1986
JST Material Number:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
Document type:
Article
Article type:
原著論文
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
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JST classification (1):
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds
Terms in the title (5):
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