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ArticleJ-GLOBAL ID:200902015515261566整理番号:90A0132123

Single crystalline CoSi2 layers formed by Co implantation into Si.

SiへのCo打込みで形成される単結晶性CoSi2

著者:VAN OMMEN A H(Philips Research Lab., Eindhoven, NLD)、OTTENHEIM J J M(Philips Research Lab., Eindhoven, NLD)、BULLE‐LIEUWMA C W T(Philips Research Lab., Eindhoven, NLD)・・・
資料名:Appl Surf Sci 巻:38 号:1/4 ページ:197-206
発行年:1989年09月
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