Art
J-GLOBAL ID：200902015561067960   Reference number：91A0658181

Effect of post-deposition annealing on structure and chemistry of the TiN film/steel substrate interfaces.

TiN膜/鋼基板界面の構造と化学に対する蒸着後熱処理の効果
Author (2)：
ERDEMIR A

About ERDEMIR A

(Argonne National Lab., Illinois)

About Argonne National Lab., Illinois

, 
CHENG C C

About CHENG C C

(Inland Steel Co., Indiana)

About Inland Steel Co., Indiana


Material：
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films  (Journal of Vacuum Science and Technology. A. Vacuum, Surfaces, and Films)

About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films


Volume： 9  Issue： 3 Pt 1  Page： 439-443  Publication year： May. 1991 
JST Material Number： C0789B  ISSN： 0734-2101  CODEN： JVTAD6  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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thin film growth

About thin film growth

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

,  Transformation structures,work structures 
(WB01030N)

About Transformation structures,work structures

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
TiN膜

About TiN膜

, 
鋼

About 鋼

, 
界面

About 界面

, 
化学

About 化学

, 
蒸着

About 蒸着

, 
後熱処理

About 後熱処理


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