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ArticleJ-GLOBAL ID:200902015596906329整理番号:92A0831222

RFマグネトロンスパッタによって作製したZnO薄膜の光学的特性

Optical properties of ZnO films prepared by RF magnetron sputtering.

著者:高田秀一(東京電機大 工)、池田修(東京電機大 工)、中野篤(東京電機大 工)・・・
資料名:応用物理学会学術講演会講演予稿集 巻:53rd 号:2 ページ:430
発行年:1992年09月
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About J-GLOBAL

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