magnetron sputtering

設計および工業的操作・装置・部品
Synonyms (4)：

magnetron sputtering (マグネトロンスパッタ)
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magnetron-sputtering (マグネトロンスパッタ)
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magnetron sputtering method (マグネトロンスパッタ法)
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マグネトロン型スパッタリング
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Broader terms (1)：

sputtering (スパッタリング)
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Narrower terms (5)：

reactive magnetron sputtering (反応性マグネトロンスパッタリング)
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DC magnetron sputtering (直流マグネトロンスパッタリング)
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MF sputtering (MFスパッタリング)
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RF magnetron sputtering (RFマグネトロンスパッタリング)
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HiPIMS
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