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ArticleJ-GLOBAL ID:200902015646288869整理番号:86A0509153

Optical and electrical characterizations of laser-chemical-vapor-deposited aluminum oxynitride films.

レーザ化学蒸着法により作製したアルミニウム酸化窒化物膜の光学的および電気的特性評価

著者:DEMIRYONT H(Colorado State Univ.)、THOMPSON L R(Colorado State Univ.)、COLLINS G J(Colorado State Univ.)
資料名:J Appl Phys 巻:59 号:9 ページ:3235-3240
発行年:1986年05月01日
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