Term
J-GLOBAL ID:200906064662105826 

chemical vapor deposition

Subject category:
Subject category
Subject category of the technical term.
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Sciterm (4):
Sciterm
Terms compiled by the various academic associations and the Ministry of Education, Culture, Sports, Science and Technology.
  • 物理学編(増訂版) / 化学蒸着 / chemical vapor deposition
  • 化学編(増訂2版) / 化学蒸着 / chemical vapor deposition (CVD)
  • 分光学編(増訂版) / 化学蒸着 / chemical vapor deposition(CVD)
  • 分光学編(増訂版) / CVD / CVD
Synonyms (12):
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Related terms  (4):
Broader terms  (1):
Narrower terms (21):
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