Term

J-GLOBAL ID：200906064662105826

chemical vapor deposition

表面処理

分光学編(増訂版) / CVD / CVD
化学編(増訂2版) / 化学蒸着 / chemical vapor deposition (CVD)
分光学編(増訂版) / 化学蒸着 / chemical vapor deposition(CVD)
物理学編(増訂版) / 化学蒸着 / chemical vapor deposition

Synonyms (12)：

chemical vapor deposition (化学的蒸着法)
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chemical vapor deposition (化学的気相成長法)
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chemical vapor deposition (化学的気相成長)
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reactive deposition (反応性蒸着)
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CVD (CVD【化学蒸着】)
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Related terms (11)：

vacuum deposition (真空蒸着)
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vapor plating (気相めっき)
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CVI (CVI【浸透】)
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diamond film (ダイヤモンド膜)
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growing temperature (成長温度)
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Broader terms (1)：

vapor deposition (蒸着)
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Narrower terms (18)：

MOCVD
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plasma CVD (プラズマCVD)
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LPCVD
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VAD method (VAD法【光ファイバ】)
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photo-CVD (光CVD)
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