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ArticleJ-GLOBAL ID:200902015662808392整理番号:86A0143854

3次元フォトレジスト形状シミュレータTRIPS‐I

Three-dimensional photoresist image simulator TRIPS-I.

著者:石垣明美(日立)、松沢敏晴(日立)、伊藤鉄男(日立)・・・
資料名:半導体・集積回路技術シンポジウム講演論文集 巻:29th ページ:31-36
発行年:1985年12月05日
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.