Art
J-GLOBAL ID：200902015667455781
Reference number：84A0321042
Investigation of diffusion barriers by Auger spectroscopy.
オージェ分光による拡散障壁の研究
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Author (3)：
,
,
Material：
Volume：
2
Issue：
2 Pt 1
Page：
300-301
Publication year：
Apr. 1984
JST Material Number：
C0789B
ISSN：
0734-2101
CODEN：
JVTAD6
Document type：
Article
Article type：
短報
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Metallic thin films
, Diffusion in metals
, Manufacturing technology of solid-state devices
Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
,
,
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