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ArticleJ-GLOBAL ID:200902015667455781整理番号:84A0321042

Investigation of diffusion barriers by Auger spectroscopy.

オージェ分光による拡散障壁の研究

著者:LEWIS J E(IBM, New York)、HO P S(IBM, New York)、KOESTER U(Univ. Dortmund, Federal Republic of Germany)
資料名:J Vac Sci Technol A 巻:2 号:2 Pt 1 ページ:300-301
発行年:1984年04月
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About J-GLOBAL

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