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ArticleJ-GLOBAL ID:200902015697660800整理番号:90A0483366

化学蒸着法による鋼材表面のTiN被膜生成条件

Optimum condition for the forming of TiN films on steel substrates by chemical vapour deposition.

著者:岩井彦哉(産業技短大)、厚井寿弘(産業技短大)、伊藤弘之(産業技短大)・・・
資料名:材料とプロセス 巻:3 号:2 ページ:680
発行年:1990年03月
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