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ArticleJ-GLOBAL ID:200902015713890501整理番号:83A0151923

The combined effects of Fe and H2 on the nitridation of silicon.

けい素の窒化に及ぼすFeとH2の複合効果

著者:SHAW N J(Lewis Research Center National Aeronautical and Space Administration, Ohio)
資料名:J Mater Sci Lett 巻:1 号:8 ページ:337-340
発行年:1982年08月
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