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ArticleJ-GLOBAL ID:200902018986443051整理番号:86A0425090

In situ characterization of nucleation, growth, and composition of ion-assisted films by ellipsometry, reflectance-transmittance measurements, and ion-scattering spectroscopy.

分光偏光解析法,反射率‐透過率測定,およびイオン散乱分析法によるイオン応用蒸着膜の核生成,成長,および組成のその場評価

著者:MARTIN P J(CSIRO, Australia)、NETTERFIELD R P(CSIRO, Australia)、SAINTY W G(CSIRO, Australia)・・・
資料名:J Vac Sci Technol A 巻:4 号:3 Pt 1 ページ:463-464
発行年:1986年05月
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