Art
J-GLOBAL ID：200902023173949261   Reference number：93A0151549

Highly conductive and transparent films of tin and fluorine doped indium oxide produced by APCVD.

APCVDで作製したすずとふっ素をドープした酸化インジウムの高伝導性透明膜
Author (1)：
MAYER B

About MAYER B

(Watkins-Johnson Co., CA, USA)

About Watkins-Johnson Co., CA, USA


Material：
Thin Solid Films

About Thin Solid Films


Volume： 221  Issue： 1/2  Page： 166-182  Publication year： Dec. 10, 1992 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
chemical vapor deposition

About chemical vapor deposition

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

,  Electric conduction in crystalline semiconductors 
(BM03043X)

About Electric conduction in crystalline semiconductors

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
APCVD

About APCVD

, 
作製

About 作製

, 
すず

About すず

, 
ふっ素

About ふっ素

, 
ドープ

About ドープ

, 
酸化インジウム

About 酸化インジウム

, 
透明膜

About 透明膜


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