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ArticleJ-GLOBAL ID:200902023173949261整理番号:93A0151549

Highly conductive and transparent films of tin and fluorine doped indium oxide produced by APCVD.

APCVDで作製したすずとふっ素をドープした酸化インジウムの高伝導性透明膜

著者:MAYER B(Watkins‐Johnson Co., CA, USA)
資料名:Thin Solid Films 巻:221 号:1/2 ページ:166-182
発行年:1992年12月10日
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