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J-GLOBAL ID:200902131021631506   Reference number:98A0282921

Formation of Ti-N Thin Films Prepared by Dynamic Ion Mixing Technique and Their Mechanical Properties.

ダイナミックイオンミキシング法によるTi-N系薄膜の形成とその機械的性質
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Volume: 64  Issue: 618  Page: 402-408  Publication year: Feb. 1998 
JST Material Number: F0227B  ISSN: 0387-5008  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Surface treatment in general 
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