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ArticleJ-GLOBAL ID:200902131021631506整理番号:98A0282921

ダイナミックイオンミキシング法によるTi‐N系薄膜の形成とその機械的性質

Formation of Ti-N Thin Films Prepared by Dynamic Ion Mixing Technique and Their Mechanical Properties.

著者:松室昭仁(名古屋大 工)、林敏行(名古屋大 大学院)、池田修(名古屋大 大学院)・・・
資料名:日本機械学会論文集 A編 巻:64 号:618 ページ:402-408
発行年:1998年02月
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