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ArticleJ-GLOBAL ID:200902131044309440整理番号:95A0746572

Effect of wall charging on an oxygen plasma created in a helicon diffusion reactor used for silica deposition.

シリカ堆積用のヘリコン拡散炉中に生じる壁帯電の酸素プラズマへの影響

著者:CHARLES C(Australian National Univ., ACT, AUS)、BOSWELL R W(Australian National Univ., ACT, AUS)
資料名:J Vac Sci Technol A 巻:13 号:4 ページ:2067-2073
発行年:1995年07月
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