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ArticleJ-GLOBAL ID:200902131052068761整理番号:96A0038473

An actinometric study of C2H2 plasma polymerization and film properties.

C2H2のプラズマ重合の光量測定による研究と成膜の性質

著者:MOTA R P(UNESP, Paulo, BRA)、SHIOSAWA T(UNICAMP, Campinas Sao Paulo, BRA)、DURRANT S F(UNICAMP, Campinas Sao Paulo, BRA)・・・
資料名:J Vac Sci Technol A 巻:13 号:6 ページ:2747-2752
発行年:1995年11月
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