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ArticleJ-GLOBAL ID:200902165053611010整理番号:00A0155992

Sputtering mechanisms of polycrystalline platinum by low energy ions.

低エネルギーイオンによる多結晶白金のスパッタリング機構

著者:CHERNYSH V S(Moscow State Univ., Moscow, RUS)、ECKSTEIN W(Max‐Planck‐Inst. Plasmaphysik, Garching, DEU)、HAIDAROV A A(Moscow State Univ., Moscow, RUS)・・・
資料名:Nucl Instrum Method Phys Res Sect B Beam Interact Mater At 巻:160 号:2 ページ:221-230
発行年:2000年02月
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