Art
J-GLOBAL ID：200902165053611010   Reference number：00A0155992

Sputtering mechanisms of polycrystalline platinum by low energy ions.

低エネルギーイオンによる多結晶白金のスパッタリング機構
Author (6)：
CHERNYSH V S

About CHERNYSH V S

(Moscow State Univ., Moscow, RUS)

About Moscow State Univ., Moscow, RUS

, 
ECKSTEIN W

About ECKSTEIN W

(Max-Planck-Inst. Plasmaphysik, Garching, DEU)

About Max-Planck-Inst. Plasmaphysik, Garching, DEU

, 
HAIDAROV A A

About HAIDAROV A A

(Moscow State Univ., Moscow, RUS)

About Moscow State Univ., Moscow, RUS

, 
KULIKAUSKAS V S

About KULIKAUSKAS V S

(Moscow State Univ., Moscow, RUS)

About Moscow State Univ., Moscow, RUS

, 
MASHKOVA E S

About MASHKOVA E S

(Moscow State Univ., Moscow, RUS)

About Moscow State Univ., Moscow, RUS

, 
MOLCHANOV V A

About MOLCHANOV V A

(Moscow State Univ., Moscow, RUS)

About Moscow State Univ., Moscow, RUS


Material：
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)

About Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms


Volume： 160  Issue： 2  Page： 221-230  Publication year： Feb. 2000 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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heavy ion irradiation

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
1次はじき出し原子

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Sputtering 
(BK16110U)

About Sputtering

,  Interactions with ions 
(BK16070Z)

About Interactions with ions

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
低エネルギーイオン

About 低エネルギーイオン

, 
多結晶

About 多結晶

, 
白金

About 白金

, 
スパッタリング

About スパッタリング


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