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ArticleJ-GLOBAL ID:200902165203763493整理番号:02A0807071

Optimized oxygen plasma etching of polyimide films for low loss optical waveguides.

低損失光導波路用のポリイミド膜の最適酸素プラズマエッチング

著者:AGARWAL N(Rensselaer Polytechnic Inst., New York)、PONOTH S(Rensselaer Polytechnic Inst., New York)、PLAWSKY J(Rensselaer Polytechnic Inst., New York)・・・
資料名:J Vac Sci Technol A 巻:20 号:5 ページ:1587-1591
発行年:2002年09月
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J-GLOBAL: Linking, Expanding and Sparking

About J-GLOBAL

Linking

J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
It’s useful for making new discoveries and uncovering new information.

Expanding

The system enables searches of similar kinds of content through linkage with external sites.
It helps you to obtain knowledge from dissimilar fields and discover concepts that cross the boundaries of specialisms.

Sparking

Through repeated linkage and expansioniteration, J-GLOBAL provides unexpected hints for problem-solving and the illumination of new ideas.