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ArticleJ-GLOBAL ID:200902212376837857整理番号:06A0238432

Toward Nanometer-Scale Optical Photolithography: Utilizing the Near-Field of Bowtie Optical Nanoantennas

ナノメータ規模の光リソグラフィーに向けて: 蝶ネクタイ型光ナノアンテナの近接場の利用

著者:SUNDARAMURTHY Arvind(Stanford Univ., California)、SCHUCK P.James(Stanford Univ., California)、CONLEY Nicholas R.(Stanford Univ., California)・・・
資料名:Nano Lett 巻:6 号:3 ページ:355-360
発行年:2006年03月
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About J-GLOBAL

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