photolithography

電子素子
Synonyms (9)：

photolithography (光リソグラフィー)
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optical lithography (光リソグラフィー)
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photolithography (光食刻法)
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photolithography (光露光技術)
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フォトリソグラフィー技術
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Related terms (13)：

sub-resolution assist feature (サブ解像度補助パターン)
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attenuated phase shift mask (減衰位相シフトマスク)
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binary intensity mask (バイナリマスク)
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photomask blank (フォトマスクブランクス)
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alternating phase-shifting mask (交互位相シフトマスク)
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Broader terms (1)：

lithography (リソグラフィー)
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Narrower terms (7)：

laser lithography (レーザリソグラフィー)
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quantum lithography (量子リソグラフィー)
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EUV lithography (EUVリソグラフィー)
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immersion lithography (液浸リソグラフィー)
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extreme ultraviolet lithography (極端紫外線リソグラフィー)
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