About AKASHI T
About Hitachi, Ltd., Ibaraki, JPN
About YOSHIMURA Y
About Hitachi, Ltd., Ibaraki, JPN
About Journal of Micromechanics and Microengineering
About bonding and joining
About positive electrode
About Manufacturing technology of solid-state devices
About 陽極接合
About シリコンウエハ
About エッチングマスク
About ほうけい酸ガラス
About 反応性イオンエッチング