Art
J-GLOBAL ID：200902212391686482   Reference number：03A0659373

Ar ECRプラズマによるBrCNの解離励起反応を用いたa-CN薄膜の生成過程

Author (3)：
NAMIKI KEIICHI

About NAMIKI KEIICHI

(長岡技科大)

About 長岡技科大

, 
SAITO HIDETOSHI

About SAITO HIDETOSHI

(長岡技科大)

About 長岡技科大

, 
ITO HARUHIKO

About ITO HARUHIKO

(長岡技科大)

About 長岡技科大


Material：
応用物理学会学術講演会講演予稿集  (Extended Abstracts. Annual Meeting. Japan Society of Applied Physics)

About 応用物理学会学術講演会講演予稿集


Volume： 64th  Issue： 2  Page： 532  Publication year： Aug. 30, 2003 
JST Material Number： Y0055A  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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electron cyclotron resonance plasma

About electron cyclotron resonance plasma

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
窒化炭素

About 窒化炭素


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
Ar

About Ar

, 
ECRプラズマ

About ECRプラズマ

, 
解離

About 解離

, 
励起反応

About 励起反応

, 
Cn

About Cn

, 
薄膜

About 薄膜

, 
過程

About 過程


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