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J-GLOBAL ID:200902212472995137   Reference number:06A0513495

The ultra-precision machine based on a liner-motor drive and machining cases

工作機械の最新技術動向 リニアモータを用いた超精密加工機と加工事例
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Volume: 50  Issue:Page: 373-376  Publication year: Jul. 01, 2006 
JST Material Number: L0473A  ISSN: 0914-2703  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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