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J-GLOBAL ID：201702222002729972   Reference number：17A0381553

An elastomer-based MEMS fabry-perot interferometer for physical and biological sensing by dry transfer technique

乾式移送法による物理的および生物学的センシングのためのエラストマーMEMS Fabry-Perot干渉計【Powered by NICT】
Author (5)：
Takahashi Kazuhiro

About Takahashi Kazuhiro

(Toyohashi Univ. of Tech., Toyohashi, Aichi, Japan)

About Toyohashi Univ. of Tech., Toyohashi, Aichi, Japan

, 
Fujie Toshinori

About Fujie Toshinori

(JST PRESTO, Tokyo, Japan)

About JST PRESTO, Tokyo, Japan

, 
Sato Nobutaka

About Sato Nobutaka

(Waseda Univ., Tokyo, Japan)

About Waseda Univ., Tokyo, Japan

, 
Takeoka Shinji

About Takeoka Shinji

(Waseda Univ., Tokyo, Japan)

About Waseda Univ., Tokyo, Japan

, 
Sawada Kazuaki

About Sawada Kazuaki

(Toyohashi Univ. of Tech., Toyohashi, Aichi, Japan)

About Toyohashi Univ. of Tech., Toyohashi, Aichi, Japan


Material：
IEEE Conference Proceedings  (IEEE Conf Proc)

About IEEE Conference Proceedings


Volume： 2017  Issue： MEMS  Page： 704-707  Publication year： 2017 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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We developed an elastomer-base...
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
Young's modulus

About Young's modulus

, 
high temperature

About high temperature

, 
*MEMS

About MEMS

, 
pressure fluctuation

About pressure fluctuation

, 
*interferometer

About interferometer

, 
thin film

About thin film

, 
nanosheet

About nanosheet


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
自立膜

About 自立膜

, 
粘着性

About 粘着性

, 
弾性歪

About 弾性歪

, 【Automatic Indexing@JST】
JST classification (1)：
JST classification
Category name(code) classified by JST.
Physical properties of polymer solids 
(CG02024U)

About Physical properties of polymer solids

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
移送

About 移送

, 
物理

About 物理

, 
生物学

About 生物学

, 
センシング

About センシング

, 
エラストマー

About エラストマー

, 
MEMS

About MEMS

, 
Fabry-Perot干渉計

About Fabry-Perot干渉計


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