Art
J-GLOBAL ID：201702276526278367   Reference number：17A0002427

Time-resolved OES on Argon DBD with a Water Electrode~Experimental Results and Numerical Simulation~

ウェハ電極によるアルゴンDBDでの時間分解OES
Author (3)：
SHIRAFUJI T.

About SHIRAFUJI T.

(Osaka City Univ., Osaka, JPN)

About Osaka City Univ., Osaka, JPN

, 
OBANA K.

About OBANA K.

(Osaka City Univ., Osaka, JPN)

About Osaka City Univ., Osaka, JPN

, 
TANAKA K.

About TANAKA K.

(Osaka City Univ., Osaka, JPN)

About Osaka City Univ., Osaka, JPN


Material：
Proceedings of International Symposium on Dry Process  (Proc Int Symp Dry Process)

About Proceedings of International Symposium on Dry Process


Volume： 37th  Page： 185-186  Publication year： 2015 
JST Material Number： Y0378B  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
silent discharge

About silent discharge

, 
argon

About argon

, 
wafer

About wafer

, 
electrode

About electrode

, 
time resolution

About time resolution

, 
*emission spectroscopy

About emission spectroscopy


JST classification (1)：
JST classification
Category name(code) classified by JST.
Spectroscopy and spectrometers in general 
(BD07041Q)

About Spectroscopy and spectrometers in general

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
ウェハ

About ウェハ

, 
アルゴン

About アルゴン

, 
DBD

About DBD

, 
分解

About 分解


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