About Kikuta Daigo
About Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan
About Itoh Kenji
About Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan
About Narita Tetsuo
About Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan
About Mori Tomohiko
About Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan
About Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films
About MOSFET
About substrate(plate)
About gallium nitride
About compound semiconductor
About semiconductor thin film
About laminate structure
About silicon dioxide
About aluminum oxide
About reliability(property)
About leakage current
About carrier capture
About density
About oxide film
About insulating film
About dielectric thin film
About metal oxide semiconductor field-effect transistor
About ナノ積層構造
About 界面トラップ密度
About trap density
About gate dielectric
About Transistors
About GaN
About MOSデバイス
About ゲート酸化膜
About Al2O3
About SiO2
About ナノ積層体