研究キーワード (3件):
ガラスインプリント
, マイクロマシン
, Micro Electro Mechanical System
競争的資金等の研究課題 (4件):
1998 - 厚膜レジストを用いた微小構造体の作製 Si鋳型を用いたマイクロ電鋳プロセス
マイクロマシニング
Micromachining
LIGA LIKE PROCESS Micro Electro-forming Process using a silicon-mold
論文 (8件):
Manabu Yasui, Satoru Kaneko, Masaharu Takahashi, Hiroaki Ito, Masahiro Arai, Yasuo Hirabayashi, Takeshi Ozawa, Ryutaro Maeda. Property Variation of Ni-W Electroformed Mold for Micro-Press Molding. JAPANESE JOURNAL OF APPLIED PHYSICS. 2013. 52. 11
Satoru Kaneko, Takeshi Ito, Kensuke Akiyama, Manabu Yasui, Yasuo Hirabayashi, Masayasu Soga, Yumiko Miyake, Mamoru Yoshimoto. Nano-Cube MgO Formed on Silicon Substrate Using Pulsed Laser Deposition. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY. 2012. 12. 3. 2320-2325
Satoru Kaneko, Takeshi Ito, Kensuke Akiyama, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Yasuo Hirabayashi, Akira Mastuno, Takashi Nire, Hiroshi Funakubo, et al. Nano-strip grating lines self-organized by a high speed scanning CW laser. NANOTECHNOLOGY. 2011. 22. 17
Manabu Yasui, Yukiko Omata, Koh-ichi Sugimoto, Satoru Kaneko, Yasuo Hirabayashi, Masaharu Takahashi, Ryutaro Maeda. A Study of Imprint Mold Materials Suited for B2O3-La2O3-Based Glass. ELECTRONICS AND COMMUNICATIONS IN JAPAN. 2011. 94. 2. 17-22
安井 学, 荒井 政大, 高橋 正春, 伊藤 寛明, 井野 友博, 金子 智, 平林 康男, 前田 龍太郎. WLF則がガラスインプリント解析に与える影響の検討. 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society. 2010. 130. 10. 484-488
Satoru Kaneko, Takatoshi Nagano, Kensuke Akiyama, Takeshi Ito, Manabu Yasui, Yasuo Hirabayashi, Hiroshi Funakubo, Mamoru Yoshimoto. Large constriction of lattice constant in epitaxial magnesium oxide thin film: Effect of point defects on lattice constant. JOURNAL OF APPLIED PHYSICS. 2010. 107. 7. 073523-1-3
Manabu Yasui, Yasuo Hirabayashi, Kuniyuki Kakushima, Makoto Mita, Hiroyuki Fujita. Application of ElectroDeposition Photoresist as a sacrificial layer to the Circular Micro Hole Forming. IEEJ Transactions on Sensors and Micromachines. 2003. 123. 11. 477-482
Manabu Yasui, Yasuo Hirabayashi, Kuniyuki Kakushima, Makoto Mita, Hiroyuki Fujita. Application of ElectroDeposition Photoresist as a sacrificial layer to the Circular Micro Hole Forming. IEEJ Transactions on Sensors and Micromachines. 2003. 123. 11. 477-482
Si鎬型を用いた微細穴の試作. 電気学会E部門誌. 2002. Vol.122-E, No8, Aug. pp.415-416